Nanofabrication: Techniques and Principles by Maria Stepanova,Steven Dew

By Maria Stepanova,Steven Dew

Intended to replace scientists and engineers at the present cutting-edge in quite a few key suggestions used largely within the fabrication of buildings on the nanoscale. the current paintings covers the fundamental applied sciences for growing sub 25 nm positive aspects lithographically, depositing layers with nanometer keep watch over, and etching styles and buildings on the nanoscale. A distinguishing function of this ebook is a spotlight no longer on extension of microelectronics fabrication, yet particularly on strategies appropriate for construction NEMS, biosensors, nanomaterials, photonic crystals, and different novel units and constructions that would revolutionize society within the coming years.

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